Research Facilities


University’s research facilities, open for Research and M.Tech. (ICT) projects under certain conditions, include :

  • Transmission Electron Microscope (FEI Tecnai G2 S-Twin, 200kV) and Sample preparation facilities for TEM
  • Field Emission Scanning Electron Microscope
  • X-ray Reflectometer
  • Scanning Near Field Optical Microscope,
  • Network Analyser (to 40 GHz) and Impedance Analyser
  • Wafer prober and Device Analyser
  • Electron Beam Lithography System for direct writing and mask fabrication. The system has a stage that can handle wafer upto 6” diameter and Masks 5”x5”
  • Microelectronics Cleanroom with about 1000sft of class 1000 (ISO6) and class 100 (ISO5) areas,
  • Mask Aligner (MJB4), RF sputtering deposition unit, ebeam and thermal evaporation unit, wire bonder, profiler, Rapid Thermal Annealer, scriber, wet station, spin coaters etc.
  • Software tools for Digital Circuit Simulation, Process Simulation, Device Simulation, FPGA kits.